2008 NSTI Nanotechnology Conference and Trade Show - Nanotech 2008 - 11th Annual

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TechConnect Summit
Clean Technology 2008

MEMS and NEMS research for education

M. Husak, J. Jakovenko
Czech Technical University in Prague, CZ

Keywords:
MEMS, NEMS, microsystems, nanosystems, nanoelectronics, nanotechnology

Abstract:
The paper describes methods of active involvement of students in research work and application of research work results in educational process. Individual tasks are parts of solutions of large research projects. Individual work contributes to their professional forming. The research in the area of nanoelectronics (MEMS and NEMS) is discussed. The use of special instrument, microscope and other nanotechnology workplaces in the different institutes is necessary. The education involves nanomaterials and smart materials for sensor and smart micro and nanosystems. For example, students can be invited into the laboratory of semiconductors in order to take a closer look with atomic force microscope (AFM). The microscope is used for three dimensional imaging of nano objects and surfaces in nano scale. The students can learn several AFM techniques that provide not only surface imaging in contact and semicontact regimes but also measurement of electrical properties of surface, local anodic oxidation of material’s surface, nanomanipulation etc. A new method for education in the area of nanotechnology, narrow connection research and education, use of the nanotechnology equipment (AFM, nanolitography, etc.). The effort is targeted at the connection of the research an education, connection different workplaces from the different institutes.


Nanotech 2008 Conference Program Abstract