2008 NSTI Nanotechnology Conference and Trade Show - Nanotech 2008 - 11th Annual

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TechConnect Summit
Clean Technology 2008

Mechanical characterization of electrostatic MEMS switches

F. Souchon, A. Koszewski, D. Levy, PL. Charvet
CEA/LETI/MINATEC, FR

Keywords:
MEMS, nanoindentation, stiffness, gap height, mechanical model

Abstract:
The paper presents a methodology with nanoindentation experiments to characterize the mechanical properties of MEMS switches. After that, simple analytical models for mechanical and electrostatic aspects are used to validate these mechanical characterizations. At the end, the electrostatic behavior of switches are well-understood thanks to the mechanical charaterizations. the complete abstract is avalaible in a pdf file


Nanotech 2008 Conference Program Abstract