Modeling and simulation of a monolithic self-actuated microsystem for fluid sampling and drug delivery
P. Zhang, G.A. Jullien
University of Calgary, CA
microneedle array, actuator, BioMEMS
A novel MEMS-based microsystem including microneedle array with a self-actuated structure for fluid sampling and drug delivery is modeled, designed and simulated. The self-actuating mechanism and the microneedle array are able to be fabricated on a monolithic chip and avoids errors resulting from any bonding process and provides easy mass fabrication. The microsystem is composed of a microneedle array at the center of the microsystem and an actuating mechanisms of symmetrically arranged Z-shaped PZT unimorph benders. The Z-shape benders can enlarge and advanced the distance of the microneedle array, up to 700 m and more in the out-of-plane direction. The simulations show that a large displacement can be accomplished with a relative low actuating voltage. A finite element method analysis was used to simulate the characteristics of the microsystem. The modal resonance of the system has also been simulated. The actuation issue is a great challenge for microneedle commercialization. Few microneedles with actuating mechanisms appear in peer reviewed publications, let alone both microneedle and actuation structures on a monolithic chip. This monolithic microsystem opens up a wide application area for the commercialization of microsystems for fluid sampling and drug delivery.
Nanotech 2008 Conference Program Abstract