2008 NSTI Nanotechnology Conference and Trade Show - Nanotech 2008 - 11th Annual

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TechConnect Summit
Clean Technology 2008

Fluorination effects on tribological characteristics of hydrogenated amorphous carbon thin films

M. Rubio-Roy, S. Portal, M.C. Polo, E. Pascual, E. Bertran, J.L. Andújar
Universitat de Barcelona, ES

Keywords:
amorphous carbon, pecvd, hydrophobicity, surface energy, nanotribology

Abstract:
Hydrogenated amorphous carbon (a C:H) films are good candidates for biomedical applications, requiring smooth surfaces, biocompatibility and singular tribological characteristics. The addition of elements to a C:H films, such as oxygen, silicon, fluorine or metals, may greatly modify the initial properties (stress, hardness, wear, surface energy, friction, biocompatibility or bulk electrical and optical properties). Therefore, they are of interest for applications like protective and biocompatible coatings (e.g. for biomedical sensors and tools) and also for antisticking surfaces, low friction surfaces, self-cleaning surfaces or low layers. Our goal is to study in detail the effects of the incorporation of fluorine to amorphous carbon (a C:H:F) thin films on their tribological properties. C F bonds have shown to have, as already reported, a significant effect on diminishing surface energy. However, this is not the only effect, as the incorporation also changes other film properties (mainly friction and wear). In this work we study these effects for a C:H:F films deposited by pulsed DC plasma enhanced chemical vapour deposition (PECVD).


Nanotech 2008 Conference Program Abstract