2008 NSTI Nanotechnology Conference and Trade Show - Nanotech 2008 - 11th Annual

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TechConnect Summit
Clean Technology 2008

Germanium antimony sulphide nano wires fabricated by chemical vapour deposition and e-beam lithography

C.C. Huang, C-Y Tai, C.J. Liu, R.E. Simpson, K. Knight, D.W. Hewak
University of Southampton, UK

Keywords:
germanium antimony sulphide, nano wire, chemical vapour deposition, e-beam lithography

Abstract:
Germanium antimony sulphide (Ge-Sb-S) amorphous thin films and nano wires have been directly deposited and patterned on SiO2-on-silicon substrates by means of chemical vapour deposition, e-beam lithography and dry etching. The Ge-Sb-S thin films were formed at the deposition rate of approximately 10nm/min at a temperature of 300 degree C. In this way, Ge-Sb-S thin films with 100nm in depth were achieved in 10 minutes. The compositions of Ge-Sb-S thin films were characterized by micro-Raman and energy dispersive X-ray analysis techniques. A prototype device adopting the so-called phase-change line memory structure with a Ge-Sb-S nano wire (24nm x 100nm x 100nm thickness) was fabricated by e-beam lithography and reactive ion etching techniques with the electro-resist spin-coated on the sample for masking film with thickness of 100nm, patterned with an e-beam writer, then etched with SF6, CH4, and He gases, and finally stripping off the residual resist to complete a nano wire phase-change memory device. We are currently studying the phase-change properties of the Ge-Sb-S nano wire device through finite-element modelling. The preliminary results show this Ge-Sb-S nano wire devices have great potential for efficient, economic, fast switching (


Nanotech 2008 Conference Program Abstract