2008 NSTI Nanotechnology Conference and Trade Show - Nanotech 2008 - 11th Annual

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Clean Technology 2008

Hydrogenated Silicon nanoparticles generation in plasma with pulsed hydrogen gas

K.S. Kim, J.H. Park, S.G. Doo, Y.J. Kim, T. Kim
Sungkyunkwan University, KR

Keywords:
silicon nanoparticles, plasma, pulsed gas, size

Abstract:
In this paper, we designed an inductively-coupled plasma chamber with RF power (13.56 MHz) to synthesize only nanoparticles. Experiments were performed with various hydrogen gas on-time between 0.1 to 0.9 sec for 1 second period, with 0.2 sec step. With the use of hydrogen gas pulse, the separation of the nucleation (hydrogen-on) and the growth process (hydrogen-off) can be achieved. The synthesized nanoparticles was measured and analyzed using SEM and Image J software. Count mean diameter of primary Si particles decreased as the hydrogen-on time increased. But, if the hydrogen-on time becomes too long, the growth due to coagulation between the nuclei or slightly grown particles can occur, which leads to the lower uniformity. Especially, all the particles formed agglomerates when the hydrogen pulse on-time is over 0.5 sec (0.5 duty). And we can also confirm that the primary particle concentration increased as the hydrogen-on time increased through SEM images. Synthesized Si nanoparticles can be used for electronic or energy storage devices such as secondary batteries. Since different gas such as oxygen can be introduced in pulse mode, this gas pulse method can be used for synthesizing core shell or composite nanoparticles with small modification.


Nanotech 2008 Conference Program Abstract