Electrochemical Characteristics of a vertical array of MnO2 Nanowires Grown on Silicon Substrates for Lithium Ion Rechargeable Microbatteries
J-H Kim, T. Ayalasomayajula, D. Choi
University of Idaho, US
nanowire cathodes, high surface area, microbattery
We are developing a complementary metal-oxide-semiconductor (CMOS) compatible process for fabricating on-chip microbatteries by growing MnO2 nanowires as cathodes on silicon dioxide (SiO2)/silicon (Si) substrates. High aspect-ratio anodized aluminum oxide (AAO) templates integrated on SiO2/Si substrates can be exploited for fabrication of a vertical array of nanowires having high surface area . These nanowire arrays grown on SiO2/Si substrates were investigated in terms of electrochemical properties as cathodes. Measurements on the cells assembled with a Li anode and liquid electrolyte resulted in a cathode specific capacity of about 125 mAh/g.
Nanotech 2008 Conference Program Abstract