2008 NSTI Nanotechnology Conference and Trade Show - Nanotech 2008 - 11th Annual

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Vibration-Actuated Bistable Micromechanism for Microassembly

H-T Pham, D-A Wang
National Chung Hsing University, TW

Keywords:
bistable, micromechanism, microassembly

Abstract:
This paper proposes a novel method to switch a widely studied bistable micromechanism. Most researches utilize on-substrate thermomechanical actuators to actuate the fully compliant tensural bistable mechanisms, while others integrate comb-drive actuators to snap between the bistable mechanism’s stable equilibrium states. In this investigation, an external vibration is exploited to switch between the bistable states. There is no need to build any actuators on chip with this method. Simulations show a faster switching time than using thermal actuators and larger snapping distance between two stable equilibrium states constrained in the comb-drive case.


Nanotech 2008 Conference Program Abstract