Nanolithographic Patterning of Catalysts for Synthesis of Carbon Nanotubes
R.V. Gargate, D. Banerjee
Texas A&M University, US
carbon nanotube, CNT, DPN, dip pen
Carbon nanotubes (CNT) were synthesized on specially custom designed MEMS chips under ambient conditions without requiring conventional Chemical vapor deposition(CVD) apparatus or process gases. In this approach, a layer of fullerene (C60) of 200 nm thickness was vapor deposited on the chip. Later, dip pen nanolithography (DPN) techniques were utilized for deposition of aqueous metal salt catalyst precursors on the chips in predifined patterns and locations. The temperature of this chip then was raised upto 500 C with the help of external heater at a certain power. This was done in a minimal humidity nitrogen filled environment which served to prevent the possible oxidation of the Deposited fullerene. Characterization of the In-situ synthesized CNTs was performed using Raman Spectroscopy and Scanning Electron Microscopy.
Nanotech 2008 Conference Program Abstract