2008 NSTI Nanotechnology Conference and Trade Show - Nanotech 2008 - 11th Annual

Partnering Events:

TechConnect Summit
Clean Technology 2008

PECVD synthesis of Si nano-wires

I.I. Kravcheko
University of Florida, US

Keywords:
Si nano-wires, plasma enhanced deposition

Abstract:
Silicon nano-wires 42 nm in diameter and up to 70 micrometer long have been obtained by utilizing a common for an average nano-fabrication facility plasma equipment set that did not require special modifications.


Nanotech 2008 Conference Program Abstract