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Silicalite as structural layer for MEMS applications to Chemical Sensors
I. Pellejero, A. Rabal, M.A. Urbiztondo, J. Sesé, M. Villarroya-Gaudó, M.P. Pina, A. Uranga, G. Abadal, N. Barnio, J. Santamaría
University of Zaragoza, ES
Keywords:
silicalite membrane, microfabrication, cantilever, Young module
Abstract:
On this work new use of zeolite membranes as structural layers for MEMS-sensing applications is presented. In particular, a detailed description of the fabrication process that allows the fabrication of Silicalite- only cantilevers is handled. A preliminary evaluation of the mechanical properties of the resulting devices (resonant frecuency and Young module) has also been carried out to assess about their potentialities as resonators for gas sensing purposes.
Nanotech 2008 Conference Program Abstract
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