High-Pressure Deposition-Solidification (HDS) Technology - The New Method for Fabrication of Nanoscale Depositions
Y. Kalynushkin, K. Kylyvnyk, P. Novak, G. Herlihy
NanoEner Technologies, US
Keywords:
nonostructural deposition, HIGH-PRESSURE DEPOSITION-SOLIDIFICATION TECHNOLOGY
Abstract:
NanoEner Inc. has been developing a new process technology for the deposition of material onto a substrate. This technology maintains all advantages of existing PVD, CVD and other methods but exhibits improved quality, lower costs and reduced process time (increased productivity).
Nanotech 2008 Conference Program Abstract
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