2008 NSTI Nanotechnology Conference and Trade Show - Nanotech 2008 - 11th Annual

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TechConnect Summit
Clean Technology 2008

Design and fabrication of high sensitivity 2-axis MEMS gyro sensor by frequency matching of driving and sensing motion

J-Y Kim, M-K Kim, T. An, P.K. Kim, J. Rhim, G.B. Lim
Pohang University of Science and Technology, KR

Keywords:
micro gyro sensor, FEM(finite element method), motion equation, frequency matching

Abstract:
In the research, the efficiency of a 2-axis MEMS gyro sensor has been improved through a structural optimization using mathematical analysis which is used a motion equation and a ANSYS 10.0 program. The size of miniaturized gyro sensor by MEMS process is 5 mm5 mm1.5 mm and the gyro is implemented by mass production using batch process. To reduce any low frequency noise below 2 kHz, the resonance frequencies of the driving and sensing motions should be over 10 kHz, so the designed gyro has about 13.7 kHz resonance frequencies. In addition, by matching the resonance frequencies through the FEM simulation, the MEMS gyro sensor with high sensitivity has been designed.


Nanotech 2008 Conference Program Abstract