Nano Imprint Equipment from SUSS MicroTec
SUSS MicroTec is a world leading supplier of precision technology providing innovative solutions for markets including Nanotechnology, MEMS, Advanced Packaging, Compound Semiconductor, Silicon-On-Insulator and 3D Interconnect. The company manufactures a complete line of nano imprinting systems, photoresist and dielectric coat/bake/develop systems, microlithography exposure systems, wafer bonders and probers.
SUSS MicroTec equipment supports novel, cost-effective Micro/Nano-Replication technologies, such as nanoimprinting with thermal and UV, single imprint and step and repeat (SSIL = step and stamp imprint lithography). A new nanotechnology called Substrate Conformal Imprint Lithography (SCIL) is currently developed by Philips Research on basis of a SUSS mask aligner. SCIL enables new approaches to large-area imprint applications demonstrating excellent printing resolution and repeatability.