Molecular Vapor Deposition (MVD®) enables Surface Engineering in Nanotechnology, MEMS, BioMEMS and other applications. MVD reliably applies low temperature, Self Assembled Monolayers (SAMs) and Moisture Barriers with or without preceding Adhesion Layers on a wide range of substrate materials. Applications include antistiction coatings for actuators, sensors, and display devices. Bio-Applications include microarrays, microfluidics and implants. Consumables are minimized with micro-dosing of chemicals thereby significantly reducing costs and other problems experienced in ovens and wet process techniques. Systems and Contracted Process Services are available.