Nano Electronics & Photonics

Symposium Chair

Mark Reed
Yale University

Keynote Speakers

CMOS Process and Design Options for 32nm and beyond
Andreas Wild
Freescale Semiconductors Crolles Research Center, France

Opportunities in Nanotechnology Measurement
Darlene J.S. Solomon
Agilent Technologies, USA

Symposium Sessions
	Monday May 21
7:00	Registration
8:30	Nanotech Conference Opening & Keynotes
1:30	NanoFab: Nano Photonics Devices & Fabrication
4:20	NanoFab: Nanofabrication Equipment, Imaging & Characterization
4:00	NanoFab: Nano-Wires: Fabrication and Applications
	Tuesday May 22
7:00	TUESDAY - Registration
11:00	NanoFab: Bottom-Up Approach: Nano-Composites and Nano-Particles
1:30	NanoFab: Non-Conventional Nano-Patterning: Top Down/Bottom Up Convergence
3:30	NanoFab: Nanoscale Fabrication and Characterization - Sponsored by ASML
3:50	NanoFab: Nanoscale Fabrication and Characterization - Sponsored by ASML
6:00	IEEE-SA Nanotechnology Town HallMeeting
4:00	Poster Session 1 (4:00 - 6:00) & Expo Reception
	Wednesday May 23
8:30	Keynotes: NanoFab: NanoElectronics
11:00	NanoFab: Advances in Nano-Lithography
1:00	Nanoscale Tools
1:00	NanoFab: Novel Materials and Nano-Structures Fabrication
2:00	Nanotech Poster Session 2 - Expo Reception (2:00 - 4:00)
4:00	NanoFab: Nano Electronics: Molecular and Nano Electronics
	Thursday May 24
8:30	NanoFab Keynotes
10:30	NanoFab: Nanoscale Deposition and Patterning
10:30	NanoFab: Nano-Structure, Material and Applications
1:30	NanoFab: Nano-Devices Properties, Modeling and Fabrication
1:30	NanoFab: Nano-Material Surfaces and Thin Film Science & Technology
4:00	NanoFab: Bottom-Up Approach: Bio-Nano Device Fabrication

Symposium Program
	Monday May 21
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7:00	Registration	Main Lobby
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8:30	Nanotech Conference Opening & Keynotes	Grand Ballroom
	Session chair: Bart Romanowicz, NSTI, Andreas Wild, Freescale Semiconductors
8:30	How the US Can Ensure Energy Supply for the Future J. Hofmeister, Shell Oil, US (bio)
9:10	National Nanotech Initiative and Industrial Nanotechnology Impact A.H. Carim, Co-Chair, Nanoscale Science and Engineering Technology, Subcommittee, National Science & Technology Council, U.S. Department of Energy, US (bio)
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1:30	NanoFab: Nano Photonics Devices & Fabrication	Great America 2
	Session chair: Uma Krishnamoorthy, Sandia National Labs, US
1:30	Fabrication Process of 3D-photonic crystals via UV-Nanoimprint Lithography T. Glinsner, P. Lindner, M. Mühlberger, I. Bergmair, R. Schöftner and K. Hingerl, EV Group, AT
1:50	Engineering the Spectral Response of Waveguide Bragg Gratings Patterned by Deep Ultraviolet Nanolithography C.M. Greiner, D. Iazikov, T.W. Mossberg, A. Ticknor and B. McGinnis, LightSmyth Technologies, US
2:10	Metal-Semiconductor-Metal Ultraviolet Detectors Utilizing Ge Nanocrystals Active Medium on Si Substrate S.Y. Lo, P.J. Wu, R.H Yeh and J.W. Hong, National Central University, TW
2:30	Integrating 1D Nanostructures in Devices and Circuits for Massively Parallel and Manufacturable Nanoscale Electronics and Photonics M. Saif Islam, A. Choudhry and E. Fong, University of California- Davis, US
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4:20	NanoFab: Nanofabrication Equipment, Imaging & Characterization	Great America 2
	Session chair: Andres H. La Rosa, Portland State University and Stanley Pau, University of Arizona
4:20	Correlated roughness in polymer film containing magnetic nanoparticles M.M. Abul Kashem, J. Perlich, L. Schulz, S.V. Roth and P. Müller-Buschbaum, Technische Universität München, DE
4:40	An All-Digital Cantilever Controller for MRFM and Scanned Probe Microscopy using a Combined DSP/FPGA Design D. de Roover, L.M. Porter II, A. Emami-Naeini, J.A. Marohn, S. Kuehn, S. Garner and D.D. Smith, SC Solutions, Inc., US
5:00	Highly sensitive Scanning Capacitance Microscope H. Tanbakuchi, Agilent Technologies, US
5:20	Confocal Raman AFM, a powerful tool for the nondestructive characterization of heterogeneous materials U. Schmidt, F. Vargas, M. Kress, T. Dieing, K. Weishaupt and O. Hollricher, WITec GmbH, DE
5:40	Nano Equipment and Materials for Electronics - Market Needs and Outlook L. Sheet, SEMI, US
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4:00	NanoFab: Nano-Wires: Fabrication and Applications	Grand Ballroom F
	Session chair: Takamaro Kikkawa, Hiroshima University (Japan) and National Institute of Advanced Industrial Science and Technology (Japan)
4:00	Horizontal and Vertical Heterogeneous Integration of Nanowires on Si Substrates L. Tsakalakos, S.T. Taylor, R.R. Corderman, J. Fronheiser and J. Balch, General Electric - Global Research Center, US
4:20	One-dimensional Phase-Change Nanowires for Information Storage Application X.H. Sun and B. Yu, NASA Ames Research Center, US
4:40	Transition Metal Oxide Core-Shell Nanowires: Synthesis and Electronic Properties C. Zhou, University of Southern California, US
5:00	InSb and GaInSb nanowires for thermoelectric applications Q.L. Ye, R. Scheffler, J. Kumari and R. Leverenz, NASA Ames Research Center, US
5:20	A unique opportunity for industrial scale fabrication of semiconductor nanowire-based devices B. Nikoobkht, National Institute of Standards and Technology, US
	Tuesday May 22
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7:00	TUESDAY - Registration	Main Lobby
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11:00	NanoFab: Bottom-Up Approach: Nano-Composites and Nano-Particles	Grand Ballroom E
	Session chair: Takamaro Kikkawa, Hiroshima University (Japan) and National Institute of Advanced Industrial Science and Technology (Japan)
11:00	Synthesizing agglomerate-free nanocomposites with surface-functionalized nanoparticles in a PMMA matrix. H. Dietsch and P. Schurtenberger, University of Fribourg, CH
11:20	Fracture of Vacancy-defected Carbon Nanotubes and Their Embedded Composites S.P. Xiao and W.Y. Hou, The University of Iowa, US
11:40	Noncovalent Catenation between Metal-Ligand Coordination Macrocycles and _-Cyclodextrin Y. Liu, Lawrence Berkeley National Laboratory, US
12:00	Ultra-thin Nanocomposite Membranes for Highly Sensitive Sensors T.J. Kang, E.Y. Jang, J.H. Lee and Y.H. Kim, Seoul National University, KR
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1:30	NanoFab: Non-Conventional Nano-Patterning: Top Down/Bottom Up Convergence	Grand Ballroom E
	Session chair: Guy DeRose, California Institute of Technology, US
1:30	Gas Phase Nanoparticle Integration C.R. Barry and H.O. Jacobs, University of Minnesota, US
1:50	Template directed formation of nanostructures of biomolecules and inorganic nano-materials on silicon surface M. Liu and S.J. Rosner, Agilent Technologies, US
2:10	A Nanoengineering Approach to Regulate the Lateral Heterogeneity of Binary Self-Assembled Monolayers J.J. Yu, X.Q. Tong and A. Ueki, Agilent Technologies, Inc., US
2:30	Silicon Nanowire Transistors Fabricated by the Mass-Manufacturable, Self-Assembling “Grow-in-Place” Approach Y. Shan and S.J. Fonash, Pennsylvania State University, US
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3:30	NanoFab: Nanoscale Fabrication and Characterization - Sponsored by ASML	Grand Ballroom E
	Session chair: Norbert Kappel, ASML
3:30	ASML Strategic Alliances for NanoTechnology R. van der Werf, ASML, NL
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3:50	NanoFab: Nanoscale Fabrication and Characterization - Sponsored by ASML	Grand Ballroom E
	Session chair: Norbert Kappel, ASML
-	B. Segal, Nantero, US
-	B. Bruggeman, SVTC, US
-	M. Tang, Stanford Nanofabrication Facility, US
-	J. Brown, SiTime, US
-	J. Consolini, ASML, US
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6:00	IEEE-SA Nanotechnology Town HallMeeting	Grand Ballroom E
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4:00	Poster Session 1 (4:00 - 6:00) & Expo Reception	Exhibit Hall
	Wednesday May 23
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8:30	Keynotes: NanoFab: NanoElectronics	Grand Ballroom C
	Session chair: Uma Krishnamoorthy, Sandia National Labs and Leo Ocola, Argonne National Laboratory, US
8:30	CMOS Process and Design Options for 32nm and beyond A. Wild, Freescale Semiconductors Crolles Research Center, FR (bio)
9:15	Nanotechnology and Applications in III-V Materials and Devices I. Adesida, University of Illinois at Urbana-Champaign, US (bio)
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11:00	NanoFab: Advances in Nano-Lithography	Grand Ballroom C
	Session chair: Sang Hyun Oh, University of Minnesota, US
11:00	Novel lithography technique using an ASML stepper/scanner for the manufacture of display devices in MEMS world K. Best, P. Raval, N. Kappel, C. Yang, M. Wang, N. Jeewakhan, M. Prejda, K. Kassekert and M. Moore, ASML USA, Inc - Special Applications, US
11:20	High resolution Nanolithography using Focused Ion Beam Scanning Electron Microscopy (FIB SEM) O. Wilhelmi, L Roussel, D.J. Stokes and D.H.W. Hubert, FEI Company, NL
11:40	Dip Pen Nanolithography®: A Maturing Technology for High-Throughput Flexible Nanopatterning J.R. Haaheim, E.R. Tevaarwerk, J. Fragala and R. Shile, NanoInk, Inc., US
12:00	Fabrication of Bowtie Nano-Gap Structures by Electron Beam Lithography R. Murali, E. Walters, F. Zaman, C. Tabor, W. Huang, M. El-Sayed and J.D. Meindl, Georgia Tech, US
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1:00	Nanoscale Tools	Grand Ballroom G
	Session chair: John Tucker, Keithley Instruments
1:00	Avoiding self-heating effects and measurement errors on nanoscale devices using Pulse I-V techniques J. Tucker, KeithleyInstruments, Inc., US
1:20	Computer aided design of nano-scale technologies K. Stokbro, Atomistix, US
1:40	Electronic and magnetic transport measurements with probe stations J. Lindemuth, Lake Shore Cryotronics, US
2:00	Nanopositioners – An essential part of the nanotechnology toolkit J.F. MacKay, Mad City Labs, US
2:20	Attributes of DPN® – compelling nanotechnology; Unique Advantages of NSCRIPTOR™ J. Haahein, Nanoink, US
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1:00	NanoFab: Novel Materials and Nano-Structures Fabrication	Grand Ballroom C
	Session chair: Guy DeRose, California Institute of Technology, US
1:00	Responsive Hydrogels as Model Materials to Study the Deformation Behavior of Patterned Polymer Nanostructures V.R. Tirumala, C.M. Stafford, R. Huang, E.K. Lin and L.E. Ocola, National Institute of Standards and Technology, US
1:20	Title: Nano/micro-structures formation driven by local protonation of polymer thin films via dip-pen nanolithography C. Maedler, S. Chada, A. La Rosa and M. Yan, Portland State University, US
1:40	Bio-inorganic hybrids for nanoelectronics M. Ozkan, University of California - Riverside, US
2:00	Single Crystalline InN Nanorods: Controlled Synthesis, Characterizations, and Applications O. Kryliouk, H.J. Park, J. Mangum, T. Anderson, A. Davydov, I. Levin and Z. Liliental-Weber, University of Florida, US
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2:00	Nanotech Poster Session 2 - Expo Reception (2:00 - 4:00)	Exhibit Hall
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4:00	NanoFab: Nano Electronics: Molecular and Nano Electronics	Grand Ballroom B
	Session chair: Mangat Pawitter, Motorola, US
4:00	Nano-future: More Moore or More than Moore? A. Ionescu, EPFL, CH
4:30	Hybrid Semiconductor/Nanoelectronic Circuit Architectures K.K. Likharev, Stony Brook University, US
4:50	Three-terminal, single molecule circuits based on carbon nanotube interconnects B.R. Goldsmith, J.G. Coroneus, V.R. Khalap, A.A. Kane, G.A. Weiss and P.G. Collins, University of California, Irvine, US
5:10	A Quasimolecular Approach to the Field-effect Molecular Transistor: Theory and Application Y.-L. Zhao, T. Allison, V. Mujica, C. Gonzalez and M. Marquez, NIST Center for Theoretical and Computational Nanosciences, US
5:30	High Quality Nanogap Electrodes for Electronic Transport Measurements of Single Molecules D.E. Johnston, D.R. Strachan, B.S. Guiton, P.K. Davies, D.A. Bonnell and A.T. Johnson, University of Pennsylvania, US
	Thursday May 24
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8:30	NanoFab Keynotes	Grand Ballroom H
	Session chair: Leo Ocola, Argonne National Laboratory
8:30	MEMS Replaces the Quartz Crystal K. Petersen, Sitime Corporation, US (bio)
9:15	Opportunities in Nanotechnology Measurement D. Solomon, Agilent, US (bio)
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10:30	NanoFab: Nanoscale Deposition and Patterning	Grand Ballroom H
	Session chair: Sang Hyun Oh, University of Minnesota and Stanley Pau, University of Arizona
10:30	Electric Field Process for the Fabrication of Higher Order Structures form Biomolecule Derivatized Nanoparticles M.J. Heller, D. Dehlinger, B. Sullivan and S. Esener, University of California, San Diego, US
10:50	Nanofabrication of Biomaterial, CNT and Organic Polymer Patterned Thinfilms using Piezoelectric Ink Jet Printing J.L. Sumerel, L.F. Deravi and D.W. Wright, Dimatix, Inc., US
11:10	Direct Parallel Patterning of Multiplex DNA and protein arrays S. Rozhok, N. Amro, J. Fragala, T. Levesque and M. Nelson, NanoInk, Inc., US
11:30	Thickness-controlled Metal Nanoscale Etch for Proposed Metal Nanowires Fabrication B.C. Lee, M.H. Kim, H.J. Shin and S. Moon, Korea Institute of Science and Technology, KR
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10:30	NanoFab: Nano-Structure, Material and Applications	Grand Ballroom B
	Session chair: Greg Bogart, Sandia National Labs and Leo Ocola, Argonne National Laboratory
10:30	Electroluminescence from Surface Oxidized Silicon Nanoparticles Randomly Dispersed within a Polymer Matrix R.K. Ligman, L. Mangolini, U. Kortshagen and S.A. Campbell, University of Minnesota, US
10:50	Electroluminescence of ZnO Nanowire/p-GaN Heterojunction Light Emitting Diodes X. Wang, J.J. Cole and H.O. Jacobs, University of Minnesota, US
11:10	Monolayer to Multilayers Nanostructural Evolution in N type Oligothiphenes: Implications for OFET Performance G.R. Dholakia, A. Facchetti and T.J. Marks, ELORET / NASA Ames Research Center, US
11:30	Parylene Nanospheres, Nanotubes & Nanocoatings for Medical and Electronics Applications R. Kumar and A. Greiner, Specialty Coating Systems, US
11:50	Development of Nanostructures, Nanodevices, Nanocomposites, and Hierarchical Nanocomposites at Hawaii Nanotechnology Laboratory M. Ghasemi-Nejhad and A. Cao, University of Hawaii at Manoa, US
12:10	Influence of Stress and Temperature on the Microstructure Stability of Nanocrystalline Materials R.K. Rajgarhia, S-W. Koh, D. Spearot, A. Saxena, P. Selvam and R. Tummala, University of Arkansas, Fayetteville, US
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1:30	NanoFab: Nano-Devices Properties, Modeling and Fabrication	Grand Ballroom H
	Session chair: Mangat Pawitter, Motorola and Leo Ocola, Argonne National Laboratory
1:30	Grain Size Distribution in CoCrPtO-Based Perpendicular Magnetic Recording Media F. Hossein-Babaei, U. Kwon and R. Sinclair, Stanford University, US
1:50	400-900 nm Light Emitting Silicon Nanoparticles R.W. Liptak, X.D. Pi, U. Kortshagen and S.A. Campbell, University of Minnesota, US
2:10	Quantum Correction for the Current-Based One-Particle Monte-Carlo Method S.C. Brugger, A. Wirthmueller and A. Schenk, ETH Zürich, CH
2:30	Single Election Trapping in Nanoscale Transistors; RTS(Random Telegraph Signals) and l/f Noise L. Forbes, D.A. Miller and M.Y. Louie, Oregon State University, US
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1:30	NanoFab: Nano-Material Surfaces and Thin Film Science & Technology	Grand Ballroom B
	Session chair: Greg Bogart, Sandia National Labs and Leo Ocola, Argonne National Laboratory
1:30	Nanoscale hydrophobic coatings for the separation of liquid mixtures P. Truman, R. Frenzel, N. Longari, P. Uhlmann and M. Stamm, Institute of Polymer Research, DE
1:50	The Si-tag for Immobilizing Proteins on a Silicon Device A. Kuroda, Hiroshima University, JP
2:10	Low Temperature Nanolayers of Metal Oxides By MVD B. Kobrin, N. Dangaria and J. Chinn, Applied Microstructures, Inc, US
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4:00	NanoFab: Bottom-Up Approach: Bio-Nano Device Fabrication	Grand Ballroom H
	Session chair: Warren Lai, Alcatel-Lucent Bell Laboratories and New Jersey Nanotechnology Consortium, US
3:30	From Particle Self-Assembly to the Creation of Biologically Relevant Nanopatterns T.M. Blättler, A. Binkert, E. Reimhult, M. Textor and J. Vörös, ETH Zurich, CH
3:50	Manufacturable nanoscale membranes – material development and biological separations T.R. Gaborski, C.C. Striemer, J.L. Snyder, D.Z. Fang, P.M. Fauchet and J.L. McGrath, University of Rochester, US
4:10	Nano-Patterned Surfaces Enhance Immunoreaction Efficiency A. Valsesia, I. Mannelli, P. Colpo, F. Bretagnol, G. Ceccone and F. Rossi, European Commision Joint researcc Center, IT
4:30	Multifunctional Bio-Nano Patterns Derived from Colloidal Self-Assembly as Model Surfaces to Study Antigen-Antibody Interactions S. Krishnamoorthy, J.P. Wright, O. Worsfold, T. Fujii and M. Himmelhaus, Fujirebio, Inc., JP
4:50	Micro-photonic cylindrical waveguide based protein biosensor S.K. Padigi, K. Asante, V.S. Reddy Kovvuri, R.K. Reddy, A. La Rosa and S. Prasad, Portland State University, US

Special Symposium

Scaling of semiconductor devices has continued unabated for the past three decades, and will likely continue for the near future. However, at the end of this decade (ca. 2011), the nature of the silicon device is such that many alternative approaches are likely to be viable contenders.

Electronic, photonic and communication device opportunities are emerging, but require coordinated industrial efforts to realize their potential. Already, new materials (SOI, SiGe, strained Si) are used in current production, high-k dielectrics, fully metallic gates and more non-(Si, SiO2) are expected in the coming generations. In addition, low dimension structures such as Fin-FETS are being considered.

Yet, the International Technology Roadmap for Semiconductors does not identify logic devices beyond CMOS, which presents a unique opportunity for the research community to influence the future of technology. Consequently, this symposium will address the role of several prospective technologies in creating new device options in the post-2011 era (sub-10 nm equivalent technologies). It will provide a forum for the presentation of new designs, processes, devices, architectures, and characterization at the nanoscale. Content will be mindful of the rigors of the existing roadmaps and their associated infrastructure, but will also explore extensions to the roadmap in alignment with industry, SIA and governmental initiatives.

Topics & Application Areas

Online abstract submissions are now being accepted. Proposed topics include, but are not be limited to:

Si Based Nanoscale Devices
Hybrid Organic/Inorganic Devices
Quantum Wires and Transport
Molecular Electronics
Quantum Devices, Effects and Spintronics
Nanoscale Device Modeling
Nanoscale Process Modeling
Nanoscale Electronic Material Modeling
Inorganic Nano Wires
Organic Nano Wires
Self-Assembled Nanowires
CNT Based Devices
Nano Photonics
Optoelectronics
Memory Materials
Nanoscale Memory Devices
Interconnect Materials and Reliability
Nanoscale Architectures
Nanoscale Imaging and Instrumentation
Next Generation Display Technologies
Novel Materials
Other

Also of Interest

session on photonic systems in the Nanoparticles in Soft Materials - Colloidal Systems Symposium.

Journal Submissions

Journal of Experimental Nanoscience

Selected Nanotech Proceedings papers will be reviewed and invited into a Special Issue of the Journal of Experimental Nanoscience. The journal provides a showcase for advances in the experimental sciences underlying nanotechnology and nanomaterials.

For consideration into this Special Issue of the Journal of Experimental Nanoscience, please select the “Submit to Journal of Experimental Nanoscience” button during the on-line submission procedure. You may only select a single journal during the submission process.

Molecular Simulation

Selected Nanotech Proceedings papers will be reviewed and invited into a Special Issue of Molecular Simulation. The journal covers all aspects of research related to, or of importance to, molecular modelling and simulation (including informatics, theoretical and experimental work).

For consideration into this Special Issue of Molecular Simulations, please select the “Submit to Molecular Simulation” button during the on-line submission procedure. You may only select a single journal during the submission process.

Conference Quick Links

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