2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual
Technical Conferences
Nano Electronics & Photonics
Nano Fabrication
Sensors & Systems
Micro & Nano Fluidics
MSM - Modeling Microsystems
WCM - Compact Modeling
Nanostructured Materials & Devices
Soft Nanotechnologies & Applications
Nanoparticles in Soft Materials - Colloidal Systems
Polymer Nanotechnology
Carbon Nano Structures & Devices
Nano Particles & Applications
Composites & Interfaces
Energy Technologies & Applications
Nanotech in Health, Environment & Society
ICCN - Nanoscale Modeling
Nanoscale Characterization
Homeland Security
Bio Nano Materials & Tissues
Bio Sensors & Diagnostics
Biomarkers & Nanoparticles
Cancer Diagnostics, Imaging & Treatment
Drug Delivery & Therapeutics
Nano Medicine
Nanotech to Neurology
TechConnect Summit - IP Matchmaking
Cleantech 2007
Industrial Impact Workshop
Program Committee



Symposium Chair

Narayan Aluru
Narayan Aluru

Symposium Sessions


Monday May 21

7:00 Registration
8:30 Nanotech Conference Opening & Keynotes
10:30 Sensors & MEMS
1:30 MEMS/NEMS: Devices, Fabrication & Characterization
4:00 MEMS/NEMS: Chemical & Gas Sensors
4:00 MEMS/NEMS: Modeling & Characterization

Tuesday May 22

7:00 TUESDAY - Registration
8:30 Keynotes: Sensors & MEMS
11:00 Sensors & MEMS: MEMS/NEMS: Systems and Application
1:30 MEMS/NEMS: Simulation & Co-Simulation
4:00 Poster Session 1 (4:00 - 6:00) & Expo Reception

Wednesday May 23

8:30 Keynotes: Micro & Nano Fluidics - Sponsored by Kodak
10:30 Micro & Nano Fluidics: Nano Fluidic Devices - Sponsored by Kodak
2:00 Nanotech Poster Session 2 - Expo Reception (2:00 - 4:00)
4:00 Micro & Nano Fluidics: Transport & Dispersion

Thursday May 24

10:30 Micro & Nano Fluidics: Design & Simulation
1:30 Micro & Nano Fluidics: Devices 1
3:30 Micro & Nano Fluidics: Devices 2

Symposium Program


Monday May 21

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7:00 RegistrationMain Lobby
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8:30 Nanotech Conference Opening & KeynotesGrand Ballroom
 Session chair: Bart Romanowicz, NSTI, Andreas Wild, Freescale Semiconductors
8:30 How the US Can Ensure Energy Supply for the Future
J. Hofmeister, Shell Oil, US (bio)
9:10 National Nanotech Initiative and Industrial Nanotechnology Impact
A.H. Carim, Co-Chair, Nanoscale Science and Engineering Technology, Subcommittee, National Science & Technology Council, U.S. Department of Energy, US (bio)
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10:30 Sensors & MEMSGreat America 3
 Session chair: Elena Gaura, Coventry University, UK
10:30 Healthcare for the healthy people: miniaturization, sensing and actuation trend and needs in preventive and predictive medicine
A. Sanna, R. Serafin and M. Nalin, e-Services for Life and Health, Scientific Institute H. San Raffaele, Milan, IT (bio)
11:00 Collaborative Smart Objects and Augmented Materials
K. Delaney, Cork Institute of Technology, IE (bio)
11:30 Global Environmental Micro Sensors Test Operations in the Natural Environment
M.L. Adams, J. Manobianco, M. Buza and F.J. Merceret, ENSCO, Inc., US (bio)
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1:30 MEMS/NEMS: Devices, Fabrication & CharacterizationGrand Ballroom E
 Session chair: Chris Menzel, Spectra, US
1:30 Fabrication of a Real-Time Reactive Ion Etching Resonant Sensor Using a Low Temperature Sacrificial Polymer
B.G. Morris, P.J. Joseph and G.S. May, Georgia Institute of Technology, US
1:50 Characterization of An Integrated 3-Axis CMOS-MEMS Accelerometer
H. Qu, D. Fang and H. Xie, Oakland University, US
2:10 Piezoresistive effect in DLC Films
A. Tibrewala, A. Phataralaoha, E. Peiner, R. Bandorf and S. Büttgenbach, TU Braunschweig, DE
2:30 Comparison of Piezoelectric MEMS Mechanical Vibration Energy Scavengers
M. Marzencki, S. Basrour, B. Belgacem, P. Muralt and M. Colin, TIMA Laboratory, FR
2:50 Experimental results for a parametrically excited micro-ring resonator
K.M. Harish, B.J. Gallacher, J.S. Burdess and J.A. Neasham, University of Newcastle upon Tyne, UK
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4:00 MEMS/NEMS: Chemical & Gas SensorsGrand Ballroom E
 Session chair: Xavier Avula, Washington University, US
4:00 Gas fingerprinting using Carbon Nanotubes transistors arrays
P. Bondavalli, P. Legagneux and D. Pribat, THALES, FR
4:20 Manufacturable, Highly Responsive Nanowire Mercury Sensors
S. Keebaugh, W.J. Nam and S.J. Fonash, The Pennsylvania State University, US
4:40 A compact, low-power cantilever-based sensor array for chemical detection
A. Loui, T.V. Ratto, T.S. Wilson, E.V. Mukerjee, Z-Y Hu, T.A. Sulchek and B.R. Hart, Lawrence Livermore National Laboratory, US
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4:00 MEMS/NEMS: Modeling & CharacterizationGrand Ballroom G
 Session chair: Elena Gaura, Coventry University, UK
4:00 The mechanical stiffness and the size effect of the silicon based nano-structures using molecular dynamic (MD) simulation
C.A. Yuan, O. van der Sluis, G.Q. Zhang, L.J. Ernst, W.D. van Driel and R.B.R. van Silfhout, Delft University of Technology, NL
4:20 Investigation of Vector Discretization Schemes for Box Volume Methods
O. Triebl and T. Grasser, Christian Doppler Laboratory for TCAD in Microelectronics, AT
4:40 A Compact Scalable Circuit Model for RF MEMS Switches
H.M.R. Suy, H.G.A. Huizing, P.G. Steeneken and O.I. Yanson, NXP Semiconductors, NL
5:00 New Analysis Method for Coupled-Field Micro Devices
M. Motiee, A. Khajepour and R.R. Mansour, University of Waterloo, CA
5:20 Frequency Domain Modeling of SAW Devices
W.C. Wilson and G.M. Atkinson, NASA Langley Research Center, US
5:40 Modeling and Dynamics of Coupled Dome-shaped Micromechanical Oscillators
T. Sahai and A.T. Zehnder, Cornell University, US

Tuesday May 22

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7:00 TUESDAY - RegistrationMain Lobby
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8:30 Keynotes: Sensors & MEMSGrand Ballroom F
 Session chair: Elena Gaura, Coventry University, UK
8:30 Nano-structure or nano-system: opportunities and pitfalls
P. French, Delft University of Technology, NL (bio)
9:00 MEMS Sensors for Harsh Environment Applications
P.M. Nieva, University of Waterloo, CA (bio)
9:30 Balance On-a-Chip: An Electronic Prosthesis Mimicking the Dynamic Vestibular Function
A.M. Shkel, University of California Irvin, US (bio)
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11:00 Sensors & MEMS: MEMS/NEMS: Systems and ApplicationGrand Ballroom F
 Session chair: Elena Gaura, Coventry University, UK
11:00 A Silicon Ultrasonic Imager Probe for Minimally Invasive Diagnosis
J.K. Chen, P. Lin, X. Cheng, J-H Liu, S-Y Chen and P-C Li, Xerox Corp, US
11:20 A Model for Blood Cell Transport and Separation in a Magnetophoretic Microsystem
E.P. Furlani, University at Buffalo, US
11:40 A down-to-earth case for autonomy in massively plural sensor systems
R.M. Newman, E.I. Gaura and J.P. Brusey, Coventry University, UK
12:00 Microfluidics and Microacoustics for Miniature Flow Cytometry
S.K. Ravula, D.W. Branch, J. Sigman, P. Clem, G. Kaduchak and I. Brener, Sandia National Laboratories, US
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1:30 MEMS/NEMS: Simulation & Co-SimulationGrand Ballroom F
 Session chair: Cy Wilson, NASA, US
1:30 Optimization of Masks for High Aspect Ration UV-Lithographic Patterning
U. Triltsch and S. Büttgenbach, Technische Universität Braunschweig, DE
1:50 A Study on the Electrical Properties of Plasma Nitrided Oxide Gate Dielectric in Flash Memory
M. Park, K. Suh, S. Lee, H. Kang, K. Kim and K. Kim, Samsung Electronics, KR
2:10 A Method for Semi-Automated Modeling of Analog-Mixed Signal Systems in Automotive Applications based on Transient Simulation Data
H. Mielenz, R. Doelling and W. Rosenstiel, Robert Bosch Group, DE
2:30 Genetic Algorithm for the Design of Microchip Flow Cytometers
H. Bang, W.G. Lee, H. Yun, J.K. Min, C. Chung, J.K. Chang and D.-C. Han, Seoul National University, KR
2:50 FEM Simulation for demolding process in thermal imprint lithography
Z. Song, J. Lee and S. Park, Louisiana State University, US
3:10 Study of Thermal Efficiency Optimization in a Twin-bubble MEMS Micro-injector
H-K Tang, F-C Tseng, W.W. Wang, I-Y Lee, C-K Lee and K. Lee, BenQ Corporation, TW
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4:00 Poster Session 1 (4:00 - 6:00) & Expo ReceptionExhibit Hall

Wednesday May 23

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8:30 Keynotes: Micro & Nano Fluidics - Sponsored by KodakGrand Ballroom F
 Session chair: Daniel Attinger, Columbia University, US
8:30 Multiphase Microfluidics: From Tailor-Made Nanomaterials to Microflows Near the Speed of Sound
A. Guenther, University of Toronto, CA (bio)
9:15 The microfluidics of cilia motion: developmental biology, respiratory mechanics and beyond
Y. Ventikos, University of Oxford, UK (bio)
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10:30 Micro & Nano Fluidics: Nano Fluidic Devices - Sponsored by KodakGrand Ballroom F
 Session chair: Ed Furlani, Eastman Kodak, US
10:30 Overview: Micro & Nano Fluidics (invited overview presentation)
D. Attinger, Columbia University, US (bio)
11:00 Fabrication of 1D nanochannels with thin glass wafers for single molecule studies
H. Hoang, I. Segers-Nolten, N. Tas, M. de Boer, V. Subramaniam and M. Elwenspoek, Mesa+ Institute for Nanotechnology, NL
11:20 Nanoparticle transport through carbon nanopipes
M. Whitby and N. Quirke, Imperial College, UK
11:40 Functional Nanoplumbing for DNA analysis
R. Riehn, R. Staunton, S.F. Lim, W.W. Reisner and R.H. Austin, North Carolina State University, US
12:00 Gated Chemical Transport and Enhance Flow through Carbon Nanotube Membranes
M. Majumder and B. Hinds, Univ. KY, US
12:20 Nanodroplet Impact on Liquid Substrates via Molecular Dynamics
D. Lussier, N.M.P. Kakalis and Y. Ventikos, University of Oxford, UK
12:40 A Targeted Nanotechnology-based Therapeutic System for the Combined Chemoprevention of Colon Cancer
S. Prabhu and N. Kanthamneni, College of Pharmacy, Western University of Health Sciences, US
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2:00 Nanotech Poster Session 2 - Expo Reception (2:00 - 4:00)Exhibit Hall
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4:00 Micro & Nano Fluidics: Transport & DispersionGrand Ballroom C
 Session chair: Daniel Attinger, Columbia University, US
4:00 Embeddable Low-Voltage Micropump using Electroosmosis of the Second Kind
T. Heldal, T. Volden, J. Auerswald and H. Knapp, IQ Micro Inc., CH
4:20 Novel piezo motor enables positive displacement microfluidic pump
D. Henderson, New Scale Technologies, US
4:40 Chaotic advection induced by a magnetic chain in a rotating magnetic field
T.G. Kang, M.A. Hulsen, P.D. Anderson, J.M.J den Toonder and H.E.H. Meijer, Eindhoven University of Technology, NL
5:00 Separation dynamics of binary liquid mixtures - Theory & Experiment
P. Truman, F. Varnik, P. Uhlmann, M. Stamm and D. Raabe, Institute of Polymer Research, DE
5:20 Dynamics and distribution of counterions in the vicinity of a flexible polyelectrolyte
T.S. Lo, B. Khusid, J. Koplik and A. Acrivos, New Jersey Institute of Technology, US
5:40 Droplet-based Segregation and Extraction of Concentrated Samples
C.R. Buie, P. Buckley, J. Hamilton, K.D. Ness and K.A. Rose, Lawrence Livermore National Laboratory, US

Thursday May 24

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10:30 Micro & Nano Fluidics: Design & SimulationGrand Ballroom G
 Session chair: Cy Wilson, NASA, US
10:30 A Rapid Prototyping and Mass-Production Platform of Microfluidic Devices
P. Craig Kung, Y.L. Kung, D. Holcombe, R.H. Grace, G. Ungelenk, E. Piechotka and W. Seiferth, Optotrack, Inc., US
10:50 Numerical Analysis of Nonlinear Deformation and Breakup of Slender Microjets with Application to Continuous Inkjet Printing
E.P. Furlani, Eastman Kodak Company, US
11:10 Drop formation mechanisms in piezo-acoustic inkjet
H.M.A. Wijshoff, Océ Technologies B.V., NL
11:30 Numerical Simulation of Droplet Generation Mode Transition of Co-flowing Liquids in Micro-channel
J.S. Hua, M. Cheng and T.G. Liu, Institute of High Performance Computing, SG
11:50 Multi-physics Simulational Analysis of a Novel PCR Micro-Device
Y. Wang, K. Pant, J. Grover and S. Sundaram, CFD Research Corporation, US
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1:30 Micro & Nano Fluidics: Devices 1Grand Ballroom G
 Session chair: Daniel Attinger, Columbia University, US
1:30 A Microfluidic Array with Micro Cell Sieves for Cell Cytotoxicity Screening
Z.H. Wang, M.C. Kim, M. Marquez and T. Thorsen, Massachusetts Institute of Technology, US
1:50 Development of Immunoassay Microfluidic Chip Using Serial-flow Method
J. Hsieh, H-L Yin, Y-C Huang, H-H Hsu, Y-S Lin and T-T Huang, Instrument Technology Research Center, TW
2:10 A method for the highly parallel analysis of gene expression of single cells
W.R.A. Meuleman, N. Milner, D.W.K. Lueerssen and E.M. Southern, Oxford Gene Technology, UK
2:30 Microfluidic Cell Culture System for Live Cell Imaging
M.J. Powell, L.K. Higashi, A.A. Cabasug, S.M. Giffin and R.K. Alley, Nanopoint Inc., US
2:50 Bubble-based actuation schemes for microfluididic chips
J. Xu, M. Dhur and D. Attinger, Columbia University, US
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3:30 Micro & Nano Fluidics: Devices 2Grand Ballroom G
 Session chair: Daniel Attinger, Columbia University, US
3:30 Multifunctional Microvalves Control by Optical Illumination on Nanoheaters and its Application in Centrifugal Microfluidic Devices
J-M Park, Y-K Cho, B-S Lee, J-G Lee and C. Ko, Samsung Advanced Institute of Technology, KR
3:50 Methods of energizing micro flows by acoustic and electric fields
F. Schönfeld, D. Dadic, S. Hardt, R. Püschl and F. Schmitz, Institut für Mikrotechnik Mainz / IMM, DE
4:10 Liquid transport detection using single FET devices
P. Truman, P. Uhlmann and M. Stamm, Institute of Polymer Research, DE

Special Symposium

Micro, and Nano Electro Mechanical systems (MEMS & NEMS), by their very nature as sensors and/or actuators, must interact with their environment. This need for interaction implies the interaction of various physical energy domains. Semiconductor materials naturally offer the strong field coupling required by such transducers, not only by their physical material properties, but also through the use of small length scales with corresponding manufacturing technologies.

Novel material sets, reduced physical dimensions, and the increasing blending of traditionally disparate engineering disciplines is evident in recent research and development in this rapidly developing field.

This symposium will address technical advancements in the topics listed below, but will encourage submissions addressing any research, development or commercialization activity. We additionally encourage your participation in this community, through your comments, suggestions and offers for assistance in review and organization.

Joint Electronics and Microsystems Symposia

Reflecting the rapid growth of the Micro and Nano systems fields and the commitment and success of the respective research communities, the Electronics and Microsystems suite of symposia at Nanotech 2007 has evolved into a premier annual event in the Micro and Nano technologies arena.

The MEMS & NEMS , Sensors & Systems , Micro & Nano Fluidics and MSM - Modeling Microsystems symposia will jointly provide a whole and comprehensive forum for a multidisciplinary community, with presentations and topics for discussion ranging from theoretical developments through design and fabrication to industry-oriented applications.

Smarter and smaller and ever more complex systems are being dreamt of, which combine micro and nano system technologies with intelligence, power supply and communication ability, at the same physical scale. Such integrated systems are to be primarily component based and, both the whole and the composites subject to a variety of trends. The increasing systems complexity and multidisciplinary pose strong challenges to the engineers involved in the modelling and fabrication of micro and nanosystems, electronics and wireless communication domains. The Microsystems and Electronics strand will provide valuable networking and interaction opportunities by successfully bringing together the four Symposia above.

World-class researchers in several focused topics of MEMS and NEMS will present their latest research results, allowing cross-disciplinary exchange of knowledge to further advance both technological areas. MEMS is naturally continuing its downsizing into Nanoelectromechanical Systems but at the same time it is indispensable in constructing complete Nano devices and systems. MEMS and Nanotechnology are becoming highly complimentary technologies that will significantly impact various large industries across the globe.

Topics & Application Areas

Online abstract submissions are now being accepted. Proposed topics include, but are not be limited to:

  • Actuating Systems
  • Sensing Systems
  • Bio Sensors
  • Bio Micro Systems
  • RF Devices
  • Circuits For Sensors & Actuators
  • Assembly & Packaging Technologies
  • Metrology and Characterization
  • Wireless Sensor Networks
  • Micro Fluidic Analysis Systems
  • Experimental Verification
  • Device Integration
  • Novel MEMS Devices
  • Novel NEMS Devices
  • Other

Journal Submissions

Sensors & Transducers

On-line Magazine ‘Sensors & Transducers’ (S&T e-Digest)

Selected proceedings papers in the Electronics and Microsystems Track (MEMS & NEMS, Sensors & Systems, Micro & Nano Fluidics symposia, and MSM conference) will be reviewed and invited into a Special Issue of the on-line magazine ‘Sensors & Transducers’ (S&T e-Digest).

For consideration into this Special Issue of the on-line magazine ‘Sensors & Transducers’, please select the “Submit to ‘Sensors & Transducers’ (S&T e-Digest)” button during the on-line submission procedure.

Journal of Experimental Nanoscience

Journal of Experimental Nanoscience

Selected Nanotech Proceedings papers will be reviewed and invited into a Special Issue of the Journal of Experimental Nanoscience. The journal provides a showcase for advances in the experimental sciences underlying nanotechnology and nanomaterials.

For consideration into this Special Issue of the Journal of Experimental Nanoscience, please select the “Submit to Journal of Experimental Nanoscience” button during the on-line submission procedure. You may only select a single journal during the submission process.

Molecular Simulation

Molecular Simulation

Selected Nanotech Proceedings papers will be reviewed and invited into a Special Issue of Molecular Simulation. The journal covers all aspects of research related to, or of importance to, molecular modelling and simulation (including informatics, theoretical and experimental work).

For consideration into this Special Issue of Molecular Simulations, please select the “Submit to Molecular Simulation” button during the on-line submission procedure. You may only select a single journal during the submission process.

Conference Quick Links


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