2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

MEMS Sensors for Harsh Environment Applications

Patricia M. Nieva

Patricia M. Nieva

Assistant Professor, Mechanical and Mechatronics Engineering
University of Waterloo, Canada

Patricia Nieva received the M.Sc. degree in Mechanical Engineering and the Ph.D. degree in Electrical Engineering from Northeastern University, MA, in 1997 and 2004 respectively. She is now an Assistant Professor at University of Waterloo, Canada.

Prof. Nieva’s main research goal is the use of MEMS technology to design 3-D single-chip self-contained multifunctional sensing units. She is currently working in a variety of projects which comprise the development of MEMS and MOEMS structures for the simultaneous sensing of vibration, temperature, pressure and flow in harsh environments, and MEMS for micro power harvesting. Her research work also includes the development of new techniques for packaging of MEMS sensors for harsh environments such as micro-encapsulation and adhesive bonding of MEMS for high temperature operation. In addition, she is working extensively in the analysis, modeling and experimental verification of the effects of squeeze film and airflow damping in MEMS and MOEMS.

Prof. Nieva’s ongoing research work constitutes an important commitment to the identification of a simple, cost-effective and reliable technology for advanced sensing. The development of MEMS sensors for harsh environments is necessary for new applications, but can also lead to better sensor performance in existing applications of MEMS. Finally, new concepts for multiple sensing can lead to breakthroughs in reliability and lifetime, issues currently preventing commercial introduction of many microsystems.

Speaking in the Sensors & Systems Symposium.


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