2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

Comparison of Piezoelectric MEMS Mechanical Vibration Energy Scavengers

M. Marzencki, S. Basrour, B. Belgacem, P. Muralt and M. Colin
TIMA Laboratory, FR

Keywords:
energy scavenging, piezoelectric MEMS

Abstract:
This paper presents a design, modelling, fabrication and experimental test results of MEMS mechanical vibration energy scavenging devices for micro power generation. There is a growing need for such structures in the field of wireless sensor networks, where increasing the autonomy of the node is a crucial issue. In our case, the transduction is performed using the piezoelectric effect and the devices are entirely made using microfabrication techniques. This is a continuation of work already presented that proposes improved devices and use of new materials

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