2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

Glass nanostructures fabricated by soft thermal nanoimprint

C. Peroz, V. Goletto, M. Foresti, C. Heitz, L. Le Gratiet, E. Barthel and E. Sondergard
Laboratoire mixte CNRS/Saint-Gobain, FR

Keywords:
nanoimprint, sol-gel

Abstract:
Sol-gel chemistry is very versatile and structuring sol-gel materials will allow a fine tuning of chemistry, electromagnetic, optical and mechanical properties. We explore the possibilities to combine sol-gel chemistry to large scale patterning at low cost and high throughput. We demonstrate here the feasibility to fabricate organic-inorganic silica patterns over large areas with a resolution lower than 150nm by soft thermal nanoimprint lithography.

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Nanotech 2007 Conference Program Abstract

 
 

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