2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

Methodology and Design Kit Integration of a Broadband Compact Inductor Model

M. Erturk, R. Groves and E. Gordon
IBM, US

Keywords:
inductors, passive, broadband, skin effect

Abstract:
A physics-based broadband inductor model is presented that accurately captures geometry scaling, process statistics, and temperature dependence. The model utilizes an accurate and physical skin effect formulation, with substantial improvements over previous methods, along with an empirical proximity effect model to capture frequency dependent effects. The generalized model, in conjunction with a set of flexible layout parameterized-cells (pcell), has been integrated into IBM foundry design kits for a wide range of technologies with various back-end metallization options. The development of the model is presented in terms of its internal circuitry, physics-based calculations, and technology-dependent fitting parameters.

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