2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

Piezoresistive effect in DLC Films

A. Tibrewala, A. Phataralaoha, E. Peiner, R. Bandorf and S. BĆ¼ttgenbach
TU Braunschweig, DE

Keywords:
DLC, boss membrane, CMM, p-diffused silicon

Abstract:
In this work piezoresistive effect in Diamond-like carbon (DLC) films and p-diffused strain gauges is compared for the first time. DLC films are already well known in optical coatings. Here it is integrated with silicon in a MEMS test structure and shows a high gauge factor value which will make DLC films popular in MEMS. p-diffused strain gauges are presented for comparision. Both the materials shows a promise as force sensors which can be used in 3D coordinate measuring machine.

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