2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

Quantitative Synchrotron Grazing Incidence X-ray Scattering Analysis of Cylindrical Nanostructure in Supported Thin Films

J. Yoon, S.-Y. Yang, B. Lee, W.-C. Joo, K. Heo, J.K. Kim and M. Ree
Pohang University of Science and Technology, KR

Keywords:
grazing incidence X-ray scattering, nanotemplate, block copolymer thin film

Abstract:
Grazing incidence X-ray scattering (GIXS) has emerged as a powerful technique for characterizing internal structure of hin film. The X-ray beam impinges at a grazing angle onto the sample slightly above the critical angle, so that the film is still fully penetrated by Xray. Analytical solutions of GIXS atterns based on the distorted wave Born approximation have been developed to describe the complicated reflection and fraction effects, which are not found in conventional transmission X-ray scattering. Here, we attempted the quantitative analysis of the two-dimensional (2D) GIXS patterns of polystyrene-b-polymethylmethacrylate (PS-b-PMMA) diblock copolymer films deposited on silicon substrates. The analysis of the GIXS patterns with using the GIXS theory was successfully carried out

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