Batch Fabrication of Nanostructured Heterogeneous Microarrays for Chemical Sensing
E. Barborini, M. Leccardi, G. Bertolini, O. Rorato, P. Repetto, D. Bandiera, M. Gatelli, A. Raso, A. Garibbo, L. Seminara, C. Ducati and P. Milani
Tethis srl, IT
cluster beam deposition, nanostructured films, array, sensors, gas
Deposition of nanoparticles from the gas phase is becoming an enabling technology for batch production of nanostructured devices. Supersonic clusters beam deposition (SCBD) has been shown as a viable route for the production of nanostructured thin films. Due to high deposition rates, high lateral resolution, low temperature processing, SCBD can be used for the direct integration of nanostructured films on micro-fabricated platforms with limited or no post-growth processing. Here we present the industrial opportunities for batch fabrication of chemical sensor microarrays having nanostructured films of transition metal oxides as active elements, deposited on micro-fabricated substrates. Results on the detection of several gas species, including VOC, will be shown, together with the opportunities offered by Neural Networks on data analysis.
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Nanotech 2007 Conference Program Abstract