2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

Surface Molecular Contamination: New Contamination Issues and New Problems in the Fab

S. Anderson
Balazs Analytical Services, US

Keywords:
semiconductor, airborne molecular contamination, surface molecular contamination, cleanroom, yield enhancement, ITRS

Abstract:
Surface Molecular Contamination (SMC), specifically from organics (SMOrgs) are a problem for semiconductor manufacturing yields and containation management. The ITRS has outlined detection limits at 0.2ng/cm^2. The presentation will focus on contamination sources (there are many unexpected sources) and analysis methods to identify and remove contributors. Actual case study incidents will be reviewed and ommunicated to the attendees.

Back to Program

Sessions Sunday Monday Tuesday Wednesday Thursday Authors Keywords

Nanotech 2007 Conference Program Abstract

 
 

Names, and logos of other organizations are the property of those organizations and not of NSTI.
This event is not open to the general public and NSTI reserves the right to refuse admission and participation to any individual.