Parylene Polymers for Nanotechnology Applications
R. Kumar and A. Greiner
Specialty Coating Systems, US
parylene, coating, nanodevices, nanotubes, nanospheres
During the past several years, Parylene polymers have been considered an integral part of micro devices by many biomedical engineering researchers as devices are made of Parylene through MEMs technology. In advancing Parylenes applications further through the above work, Parylene hollow-nanospheres and nanotubes were successfully developed, which opened variety of new applications, in the medical and electronics areas. Examples include, but not limited to controlled release of drug delivery systems, sensors, separation technology (gases, particle filtration, bacteria etc.) and electronics (piezoelectric shaping, nanoperistaltic pumps etc.). This paper describes the methods to obtain Parylene hollow nanospheres and nanotubes, and their potential applications along with application of Parylene coatings on nanostructured substrates for functionality and reliability enhancement. Various types of spheres and particles with different functionality were also explored. The above structures are derived from the concept of hollow nanospheres and include non-tubular and non-fiber like surfaces, filled or coated internally and externally that may have different functions; attachment of functional groups that may be single or multiple layers, and coatings that may be metal or non metals.
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Nanotech 2007 Conference Program Abstract