2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

Aquarian MIcrosystems

A.K. Henning
Aquarian MIcrosystems, US

Keywords:
Engineering

Abstract:
Proprietary microvalve using proven, low power actuation method with reliable silicon construction and low-cost microfabrication manufacturing. The microvalve is actuated using precision, reliable piezoelectric means. Prototypes have been devised. Results meet flow, power, and response time requirements, and have been published.

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Nanotech 2007 Conference Program Abstract

 
 

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