2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

Compact Electromagnetic XY Stage with Nano Scale Resolution and Vibration Resistance

K.I. Lee, S.H. Kim, J.W. Cho, J.K. Shin, J.C. Yoo and Y.J. Choi
Korea Electronics Technology Institute, KR

Keywords:
electromagnetic actuator, SPM, data storage

Abstract:
The design, fabrication, and the measurement results of an electromagnetic XY stage are presented. The device has an anti vibration structure and shows a high fill factor of 45% due to its unique structure. Furthermore, the power consumption of the device is very low, which is indispensable for a portable application. The device consists of a top substrate on a flexure holding magnets, a spacer, and a PCB including multilayered coils. The top substrate is forced to move in the opposite direction of the magnets by applying a current in the coil. The flexure are designed to have no net torque around its pivot under an external acceleration, which results in a good vibration resistance. The modal analysis shows that the high order resonance can be placed above 3 kHz by gimbal. The coil is optimized for low power consumption and the FEM analysis shows that an optimal design can suppress a vibration below 10 nm under 1 G acceleration. The stage shows a good linearity and the average power consumption is 60 mW for 68 m x 68 m scanning. The first resonance frequency is 186 Hz, which is lower than expected due to the spring width decrease.

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