2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

Study of Thermal Efficiency Optimization in a Twin-bubble MEMS Micro-injector

H-K Tang, F-C Tseng, W.W. Wang, I-Y Lee, C-K Lee and K. Lee
BenQ Corporation, TW

Keywords:
thermal efficiency, Twin-bubble, micro-injector, optimization

Abstract:
In this paper, the methodology of design optimization to achieve optimal thermal efficiency of a twin bubble MEMS micro-injector is reported. This twin bubble back shooting structure can reduce the problems of crosstalk and satellite droplets. We demonstrated that the SiN layer in-between the heater and the ink has dominant effect in optimizing the thermal efficiency of this structure. Besides, a SiN layer of 0.8 um in thickness is proven for good thermal efficiency as well as good printing quality. By using this simulation tool, the layer thickness effect on bubble nucleation is well illustrated and optimized to achieve heater structure design optimization.

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