2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

Selective array preparation of biomolecules using 3D micro/nanostructures fabricated via scanning probe lithography 

I. Choi, S. Hong, J. Lee, S. Lee, Y.I. Yang, Y. Kim and J. Yi
Institute of Chemical Processes, Seoul National University, KR

Keywords:
AFM (atomic force microscopy) anodic oxidation, cell, micro/nano-structure, protein, scanning probe lithography (SPL)

Abstract:
Scanning probe lithography (SPL) has been recently applied to fabricate a variety of multilevel structures with small components of the miniaturized device, because a site defined small features (<100 nm) with precise spatial resolution can be prepared at a low cost, compared to the conventional lithography techniques. Among the available SPL techniques, AFM (atomic force microscopy) anodic oxidation is a promising method for the creation of protrusive silicon dioxide patterns, which are dependent on the applied voltage, relative humidity and scanning rate. The area patterned by AFM anodic oxidation has different chemical properties from the non patterned area, and thus site selective modification of patterned surface can be easily obtained. Herein, we combine the SPL with self assembly method and/or wet etching method for the fabrication of positive and/or negative 3D micro/nano structures. Resulting locally modified surfaces could then be used to induce the specific functionality via site selective self assembly of various materials (i.e., nanoparticles [1], biomaterials [2]) on a pre described pattern. In this study, we can successfully array bio molecules (i.e., proteins, cells) on the pre fabricated silicon structures, even a single molecular level. The successful development of micro/nanostructures for isolating biomolecules will broaden our understanding on their behavior and characteristics of molecular arry through the manipulation and quantitative measurements at the single molecular level.

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