UV Laser machining with nanoscale precision for MEMS, Microfluidics and Bio Sensors

Keywords:
Laser, Excimer, DPSS, MEMS, MOEMS, microfluidics, bio sensors

Abstract:
Excimer and UV diode-pumped solid-state (DPSS) lasers are being applied in a variety of applications that cannot be performed by mechanical, chemical, or other longer wavelength laser fabrication methods. These UV lasers, with novel beam delivery systems provide sub-micron accuracy and have the ability to micromachine a wide range of materials, from polymers to diamond. The very high peak powers result in Laser Photo Ablation producing sharply defined features in complex three dimensional shapes. A review of optical techniques will be presented including mask imaging, integrated control of mask stages and other stages of motion with the laser fire mechanisms, coordinated opposing motion (COMO) and beam shaping techniques for high throughput direct write methods. An overview of applications include MEMS, microfluidics, bio sensors, thin film patterning and surface annealing are shown herein.

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Nanotech 2007 Conference Program Abstract