2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

Surface Plasmon Enhanced Illumination

R. Benson
Office of Technology Development, US

Keywords:
Semiconductors; Direct write photolithography; Optical data storage; Biosensors.

Abstract:
The Surface Plasmon Enhanced Illumination (“SPEI”) invention is a new way to produce an extremely small and extremely bright collimated light source. It has applications in lithography, optical data storage and biosensors.

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Nanotech 2007 Conference Program Abstract

 
 

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