2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

In-Plane Transduction of Nanomechanical Microcantilever Motion To Enable Sensor Arrays

G.P. Nordin, S. Kim, J. Noh and Y. Qian
Brigham Young University, US

Keywords:
microcantilever sensors, photonic sensors

Abstract:
We have recently introduced a new microcantilever transduction mechanism that is designed to scale to large arrays on a single chip while maintaining a very compact form factor and high sensitivity. It is based on an in-plane photonic approach that uses differential optical detection. In this paper we discuss our new approach and experimental demonstration of its fundamental elements.

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Nanotech 2007 Conference Program Abstract

 
 

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