Minus K vibration isolation systems represent an important enabling technology. By reducing building and floor vibrations to unprecedented levels they enable typical nanotechnology tools to perform at unprecedented levels. These include SPMs, SEMs, micro-hardness testers, laser and optical systems, and other metrology and fabrication tools. They are easy-to-use, low-cost, passive, vacuum-adaptable, and require no air supply. Products include table-top platforms, isolation tables, and custom systems. Guaranteed 1/2 Hz natural frequencies make them very effective against low-frequency building vibrations. Their isolation performance is typically 10 to 100 times better than high-performance air tables and even better than the higher-priced active systems.
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