2007 NSTI Nanotechnology Conference and Trade Show - Nanotech 2007 - 10th Annual

Oxford Instruments

We offer flexible, configurable process tools and leading-edge processes for the precise, controllable and repeatable etching, deposition and growth of micro- and nano-structures.

Our systems provide process solutions for the micro- and nanometre engineering of materials for semiconductor, optoelectronics, MEMS & microfluidics, high quality optical coating and many other applications in micro- and nanotechnology. These solutions are based on core technologies in:

  • plasma-enhanced deposition and etch
  • atomic layer deposition (ALD)
  • molecular beam epitaxy (MBE)
  • ion beam deposition and etch

Products range from compact stand-alone systems for R&D, through batch tools and up to clustered cassette-to-cassette platforms for high-throughput production processing.

Booth: 1116

Web site:
http://www.oxford-instruments.com


 
 

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This event is not open to the general public and NSTI reserves the right to refuse admission and participation to any individual.