Idonus is specialized in the fabrication of hydrofluoric vapor phase etching apparatuses dedicated to MEMS research institutes and small volume fabrication companies. The functionality of the apparatus is adapted to the needs that arise during the development of new micro-systems and enables the clamping of wafers as well as single chips or parts of wafers. The etching apparatus is equipped with a safe acid handling system and has very low operation costs.
Further activities are infrared inspection tools for wafers, custom made wafer holders for back-side protected wet etching of wafers, holders for galvanic deposition and custom made solutions.
Booth: 803
Web site:
http://www.idonus.com
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