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Fabrication of 3D carbon microelectrodes for Li-Ion battery applications

G. Turon Teixidor, C. Wang and M.J. Madou
University of California, Irvine, US

Keywords:
SU-8, C-MEMS, 3D batteries, li-Ion intercalation

Abstract:
The fabrication of very high-aspect ratio 3D carbon microelectrodes for Li-Ion batteries is presented. Using a pyrolysis process under inert conditions, thick layers of patterned SU-8 photoresist (up to 700 ?m in height) are converted into carbon. The micro-structures resulting of this process are used as anode for a Li-Ion battery. Detailed explanation on how to create SU-8 structures of aspect ratios as high as 15:1 using UV light is provided. New shapes that are more mechanically stable during the pyrolysis shrinkage are introduced. Data referred to the electrical conductivity and the electrochemical behavior (lithium intercalation capacity) of the structures as a function of the pyrolysis temperature is provided as well. Finally, a study on the mechanical and electrical interaction between those structures and different metal substrates that are used as a current collector for the battery is presented.

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