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Determination of Frequency Dependent Fluid Damping of Micro and Nano Resonators for Different Cross-sections

W. Zhang, M. Requa and K. Turner
University of California at Santa Barbara, US

Keywords:
fluid damping, frequency, vibration

Abstract:
This research is to quantitatively investigate the fluid damping of the MEMS and NEMS flexural resonators such as AFM and carbon nanotube resonators. We systematically explore the three most important factors which affect the fluid damping (frequency, geometry and cross-section shape) to find a general rule describing the fluid damping for different flexural resonators, which help to predict resonators’ behavior and improve the design. The vibration characteristics of the resonators in fluid significantly change the damping dynamics, such as amplitude and the phase shift of the drag force, resulting in frequency and geometry dependent damping. This dependence differs for various shapes of the resonator’s cross-sections. In this paper, based on both the numerical analysis and the experimental validation, the fluid damping is analyzed and compared for resonators with three different cross-section shapes: cantilevers with rectangular cross-section, AFM with trapezoid cross section and nanotube resonators with circular cross-section

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