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New reference standards and artifacts for nanoscale property characterization

J.R. Pratt, J.A. Kramar, G. Shaw, R. Gates, P. Rice and J. Moreland
National Institute of Standards and Technology, US

Keywords:
atomic force microscope, cantilever, stiffness calibration

Abstract:
This paper provides an overview of calibration artifacts being developed at NIST that will greatly aid the accurate determination of nanoscale physical properties across a broad range of applications. We focus on three proposed reference standards: a spring constant artifact for calibration of atomic force microscope cantilever stiffness, a piezoresistive force sensor for calibration of contact force in atomic force acoustic microscopy, and a torsional oscillator for the absolute measurement of thin-film magnetic moments.

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