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Cleaning and Contamination Control Issues for Nano-Scale Devices

B. Kanegsberg and E. Kanegsberg
BFK Solutions LLC, US

Keywords:
cleaning, contamination control, nano-scale devices

Abstract:
Contamination control is imperative for the successful production of micro- and nano- devices. The goal of the presentation is to discuss current issues in contamination control for micro- and nano-devices, to review recent findings, and to discuss approaches to unresolved challenges. The key to controlling contamination in manufacture of these small components is knowledge of contamination sources, avenues of transfer, and impact on the surface of concern. The functional differences among cleaning processes steps and their applicability to critical surfaces will be provided.

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