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Sample size effect on nanoindentation of micro/nanostructures

Z-H Xu and X. Li
University of South Carolina, US

Keywords:
nanoindentation, finite element simulation, micro/nanostructures, sample size

Abstract:
The sample size effect on nanoindentation of micro/nanostructures was studied by finite element analysis method. It was found that a significant sample size effect comes in when the sample size is comparable to the indent size. To avoid the sample size effect on the mechanical property measurements of micro/nanostructures, nanoindentation must be done within certain critical indent size to sample size ratio. The nanoindentation testing criteria for micro/nanostructures have been established. Indentation deformation behavior of soft and hard micro/nanostructures is discussed in conjunction with their instinct material properties, sample shape, and three-dimensional geometry length scale.

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