Nanotechnology Conference and Trade Show - Nanotech 2006
> Program > Technical Conferences > Business & Development > Nano Impact Workshop > Nanotech Job Fair > Expo
Program
Sessions
Sunday
Monday
Tuesday
Wednesday
Thursday
Index of Authors
Index of Keywords
Confirmed Speakers
Conferences & Symposia

Conference Proceedings

Conference Technical Proceedings

Integrated Gas-Phase Manufacturing of Nanostructured Particulate Films

K. Wegner, P. Piseri, G. Bongiorno, S. Vinati, S.E. Pratsinis and P. Milani
Tethis S.r.l., IT

Keywords:
flame synthesis, thin films, deposition, gas sensors, microfabrication

Abstract:
An integrated process for controlled one-step production of nanostructured particulate thin films is presented, combining gas-phase nanoparticle synthesis, aerodynamic particle manipulation, size selection and deposition. Such films find industrial application for instance in fuel cells, supercapacitors, gas sensors or catalytic surfaces. The production process is presented by the example of titania for gas sensors. The effect of process parameters in the different processing stages – nanoparticle formation, size selection, focussing, and deposition – on nanoparticle and product film properties is investigated. Furthermore, it is demonstrated how the use of masks during deposition can even result in gas sensor array manufacturing that can be interfaced with microfabrication of ICs and MEMs.

Back to Program

Sessions Sunday Monday Tuesday Wednesday Thursday Authors

Nanotech 2006 Conference Program Abstract

 
Nanotechnology Conference | Terms of use | Privacy policy | Contact | NSTI Home
Program | Technical Conferences | Business & Development | Nano Impact Workshop | Nanotech Job Fair | Expo |
Nanotech 2006 Home | Press Room | Venue | Subscribe | Site Map
Names, and logos of other organizations are the property of those organizations and not of NSTI.
This event is not open to the general public and NSTI reserves the right to refuse admission and participation to any individual.