Millimeter long vertically aligned single-walled carbon nanotubes by an ultra long lifetime of catalysts
T. Iwasaki, G. Zhong, T. Yoshida, T. Aikawa, R. Morikane and H. Kawarada
Waseda University, JP
vertically aligned SWNT, millimeter long, root growth mode
Controlling the growth direction of SWNTs on a substrate is one of the most important issues for fabrication of SWNT-based applications, such as field effect transistors (FETs) and interconnects for LSI. We have succeeded in synthesizing vertically aligned SWNTs with lengths on the order of millimeters for a long time deposition by a point-arc microwave plasma CVD. The height of SWNTs is 1.5mm in 10 hours. The Fe catalytic particles were kept active after the growth of SWNTs for more than 20 hours. A surface density of 1E16/m2 was obtained and this value corresponds to 1/10 of the closed-packed density. High density is very attractive for multi-layer interconnects for LSI and a super capacitor. We also clarified the growth mode of vertically aligned SWNTs using a new method called Marker Growth. Two layers of SWNTs were synthesized intermittently for different growth times. Considering the thickness and the growth time, we could identify the two layers using a line between the layers as a marker. As a result, the root growth mode of vertically aligned SWNTs was successfully clarified.
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Nanotech 2006 Conference Program Abstract