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Investigation of Different Heating Regimes of Laser-Assisted Cleaning using Molecular Dynamics Simulation

B. Unlusu, E. Varo, M.Y. Hussaini and L.D. Gelb
Florida State University, US

Keywords:
laser-assisted cleaning, simulation

Abstract:
Laser-assisted cleaning is a technique developed in the early 90s that can efficiently remove micro and sub-micro scale particles from critical surfaces. It is a non-contact method that can be applied in two different ways. In dry laser cleaning (DLC), particle and/or the substrate absorb the laser light. The impulse generated by the thermal expansion of the absorbing medium results in the removal of particles. In energy transfer medium (ETM) cleaning, a small amount of liquid (known as energy transfer medium) is deposited on the surface. In this case, laser energy is absorbed by any of the media or any combination of them. Particle removal is facilitated by the explosive boiling of the ETM. In this study, we have used a two-dimensional molecular dynamics approach to investigate different heating regimes of the laser cleaning process. Specifically, we have determined the cleaning efficiencies for different ETM thicknesses when the laser light is absorbed only by the particle, only by the ETM and by both the particle and the substrate. These cases are compared with the previously analyzed case where substrate is the medium that absorbs the laser light.

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