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Micro-Patternable SU-8 Nano-Filter Integratable with Micro Structures for Molecule Screening

C.J. Chang, L.H. Lan, C.S. Yang and F.G. Tseng
National Tsing Hua University, TW

Keywords:
SU-8, nano-filter, microstructures

Abstract:
This paper proposes a novel technology to fabricate micro-patternable nano-structures with sizes ranging from 6-10 nm on SU-8 resist, which can be incorporated with regular high-aspect-ratio micro structures for micro/nano fluidic system. The fabricated nano structures can be applied to be a molecular filter for molecule screening. Through NIP Test, it showed that this nano fabricated SU-8 micro filter with nano channels has enough mechanical strength to support the structure. Fluorescent dye test has also demonstrated that Rhodamine-B can pass through the SU-8 filter within 40 minutes. This simple process provides a novel way for the integration of nano filter and micro structures for molecular level filtering in lab on chip systems.

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