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Design and Fabrication of Flexible OTFT Array by using Nanocontact Printing

J. Jo, K-Y Kim, E-S Lee and M. Esashi
Korea Institute of Machinery and Materials(KIMM), KR

Keywords:
nanocontact printing, PDMS stamp, OTFT, OTFT array, flexible display

Abstract:
The high-resolution and large-area flexible OTFT array to use as a driving device for an OLED was designed and fabricated in the nanocontact printing process and organic thin films could be deposited even in a low-temperature process. The gate, source, and drain electrode patterns of OTFT were fabricated through the nanocontact printing process using as a mask PDMS stamp on which an SAM used as an etching mask was inked selectively. An OTFT array was fabricated through the nanocontact printing process using SAM and PDMS stamp to prevent a leakage current from lowering the performance of a device and reduce degradation and to enable nanopattern fabrication of OTFT. An exclusive device was used to enable low-temperature process of conductive electrode, insulator, and organic semiconductor layers, so that it was possible to minimize coefficient of thermal expansion(CTE) caused by shrinkage and extension due to temperature of a plastic substrate and to provide better alignment in the patterning process. Also, since there was no substrate deformation, it was possible to prevent optical property degradation. The parylene-C was used as a gate insulator to reduce threshold voltage.

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