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Laser Postionization Secondary Neutral Mass Spectrometry for Analysis on the Nanometer-Scale

I.V. Veryovkin, W.F. Calaway, C.E. Tripa and M.J. Pellin
Argonne National Laboratory, US

Keywords:
mass spectrometry, laser postionization, ion sputtering, laser desorption

Abstract:
A new time-of-flight mass spectometer of postionized secondary neutrals, SARISA, has been developed and constructed at Argonne National Laboratory. This advanced analytical instrument has uniquely high useful yield >20%, is equipped with high spatial resolution microprobes (ion, electron and laser) that are combined with low energy ion sputtering for high depth resolution. This makes the instrument capable of three-dimensional characterization of samples with nanometer dimensions.

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