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Exploring the Limits of Spatial Resolution in Electron and Ion Beam Analysis of Nanostructures

E. Lifshin and K. Dunn
University at Albany, US

Keywords:
SEM, EDS, FIB

Abstract:
Focused electron beams in SEMs are used to excite x-rays that can be analyzed to determine the composition and in some cases the size or thickness of fine structures. These techniques can be combined with a focused ion beams (FIB) to create three dimensional maps of the structure and composition of these fine structures. This paper will address how factors such as the electron beam energy and current as well as ion beam removal rates (in the case of combined FIB/SEM) instruments can be optimized to give the most infomation in both two and three dimensional maps. Both experimental and theoretical modeling techniques will be described.

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