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Impacts of High-k Offset Spacer on 65-nm Node SOI Devices

M-W Ma, T-S Chao, K-S Kao, J-S Huang and T-F Lei
National Chiao Tung University, TW

Keywords:
high-k offset spacer, SOI, fringing electric field

Abstract:
In this paper, the 65-nm node SOI devices with high-k offset spacer was investigated. Calculated results show that the high-k offset spacer can effectively increase Ion and reduce Ioff due to the high vertical fringing field effect arising from the side capacitor comprising of gate/offset spacer/drain extension structure. This fringing field and, in turn, the Ion/Ioff current ratio and subthreshold swing can be strongly enhanced by increasing the dielectric constant of the offset spacer.

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