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MEMS Micro Spectrometer

E.R. Schildkraut, D.J. Cavicchio and D. Reyes
Block MEMS, LLC, US

Keywords:
FTIR, chem-bio, microspectrometer

Abstract:
Summary status of the development of a MEMS based Micelson micro FTIR absorption interferometer spectrometer for monitoring and identifying toxic vapors. Low cost, very low false alarm rate combined with high sensitivity are primary goals. In addition to low acquisition cost, lifetime ownership costs are minimized by absence of consummables.
 
Issues are the pushing of MEMS technology tolerances and unconventional MEMS geometries.

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